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Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Author(s):
  • James D. Plummer
  • Michael D. Deal
  • Peter B. Griffin
    • Author: James D. Plummer
    • ISBN:9788131726044
    • 10 Digit ISBN:8131726045
    • Price:Rs. 1365.00
    • Pages:817
    • Imprint:Pearson Education
    • Binding:Paperback
    • Status:Available


    Ratings:

    Unique in approach, this text provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

    Table of Content

    1. Introduction and Historical Perspective.
    2. Modern CMOS Technology.
    3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers.
    4. Semiconductor Manufacturing— Clean Rooms, Wafer Cleaning and Gettering.
    5. Lithography.
    6. Thermal Oxidation and the Si/SiO2 Interface.
    7. Dopant Diffusion.
    8. Ion Implantation.
    9. Thin Film Deposition.
    10. Etching.
    11. Backend Technology.

    Salient Features

    • Extensive use of modern computer simulation methods and examples—Integrated into each chapter.
    • Early, broad exposure to a complete chip manufacturing process.
    • Examples of modern manufacturing practice.
    • Historical perspective and introduction.
    • An integrated view of silicon technology—with an emphasis on modern computer simulation.